| 講演要旨： |
The presentation provides an overview of resonant microsensors with emphasis on their integration with CMOS technology. Applications of such microresonators range from inertial sensors to chemical/biochemical sensors, from atomic force microscopy to high-frequency filters. CMOS technology enables to co-integrate the resonant microstructures with necessary analog and digital circuit functions. In particular, the presentation highlights two novel resonant microsystems: (i) a resonant chemical/biochemical sensing platform based on disc-type microstructures vibrating in an in-plane mode shape, optimized for operation in air/liquid and (ii) a resonant magnetic field sensor providing a frequency output and a sensor resolution in the micro-Tesla range. |
