２１世紀ＣＯＥプログラム
The 21st Century COE Program
"Center of Excellence for Research and Education on Complex Functional Mechanical Systems"

MEMS関連講演会

開催概要

プログラム

講演要旨

PART I: Model Order Reduction of MEMS for efficient computer aided design and system simulation (20 mins)

Prof. Jan G. Korvink (Freiburg University)

Modern commercial computer aided design (CAD) packages now support a range of physical models relevant for developers of micro electro- mechanical systems (MEMS), so that we have seen a proliferation of their use in designing individual devices. To protect this investment in effort, it would be ideal to take these detailed models and incorporate them directly into the subsequent design phase, which are comprised of system models that consider circuitry, control, and eventually packaging. In principle this is possible, yet the typical sizes of device models have remained the bottleneck, especially for "array" systems such as charge-coupled devices (CCDs) and digital micromirror devices (DMDs) where each device model is be required many times over.

In my presentation I will show how model order reduction techniques can be successfully used to efficiently create compact models of a variety of MEMS devices. The models are extracted directly from ANSYS binary files (ANSYS is a commercial and popular finite element package), so that when the compact model is used in system optimization, any invested effort in device modelling is not lost. I will show that the reduced models replicate the response of their ANSYS counterparts to within a user-defined accuracy margin over a wide frequency range. I will wrap up by showing some of the additional uses of the reduced models (e.g., in optimization.)

PART II: New Algorithms for Multiscale Microfluidic Simulations (35 mins)

Prof. Jan G. Korvink (Freiburg University)

Microfluidics is predicted to dominate MEMS applications in the near future, mainly because of its necessity in the life and biosciences. As length scales reduce, traditional methods for computational fluidics lose their validity,and often mere extensions of current models are not the best way to proceed.

We consider three exciting new approaches:

• Dissipative Particle Dynamics
• Integer Lattice Gas Automata
• Fully Coupled Level Set Methods

「マイクロ熱流体制御の広範な応用展開：Wide Variety of Possible Applications of Micro-Thermofluid Control」

工学研究科機械工学専攻　教授　吉田　英生

The possible applications of micro-thermofluid control are overviewed, mainly on the basis of the total of seventeen proceedings of IEEE International Conferences on Micro Electro Mechanical Systems held since 1987. The contents consist of three aspects. The first is thermofluid control in microsystems; particularly, the attention is focused on the various types of micropumps. The second is thermofluid control in miniaturized thermofluid machines such as a microturbine and a microcooler. The third is micro-thermofluid control for conventional-sized flow phenomena such as turbulent shear flows and a flapping-wing micro-aerial vehicle. The author stresses that, in this field, considerable advances have been achieved by relatively young researchers with various backgrounds other than the classical thermofluid dynamics, and many challenging works are in progress which will lead to new possibilities in the field of thermofluid dynamics. Also, the author has gained the impression that the researchers' byword has recently changed from "what can MEMS research do?" to "what should MEMS research do?"

「薄膜機械的物性の評価とデータベース構築　−マイクロマシン工学の体系化に向けて−」

工学研究科機械工学専攻　助教授　土屋　智由

マイクロ，ナノスケールの機械（MEMS/NEMS）では，従来のマクロスケールの機械では無視できる力が複雑に作用する場を考慮し，特性を解析する必要がある．また，マイクロ/ナノマシンに用いられる構造材料は分子・原子の堆積による方法で形成され，分子・原子を基本単位とする方法を用いて加工されるため，単純な材料として取り扱うことが困難である．このためMEMS/NEMSにおける設計は従来にない複雑さを有する．さらに，構造材料の機械的特性値は設計に必要不可欠であるが，上記の理由により既存のバルクの物性値を用いることができず，マイクロ/ナノ材料の機械的物性値の評価は測定の困難さから十分行われてきていない．そこで我々は，これらのマイクロ/ナノ材料の機械的物性値を系統的に測定し体系化することで，MEMS/NEMSデバイスのモデリング，設計に貢献できる物性値データベースを構築することをめざし，機械物性値評価法，評価の研究を行っている．本講演では薄膜機械的物性評価の研究のこれまでとデータベース化に向けた今後の取り組みを紹介する．

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